TY - CONF AU - Vikrant Gokhale AU - Jason Gorman C2 - IEEE International Conference on Micro Electro Mechanical Systems(MEMS 2018), Belfast, UK DA - 2018-01-21 00:01:00 DO - https://doi.org/10.1109/MEMSYS.2018.8346671 LA - en PB - IEEE International Conference on Micro Electro Mechanical Systems(MEMS 2018), Belfast, UK PY - 2018 TI - Identifying spurious modes in RF-MEMS resonators using photoelastic imaging ER -