Skip to main content

NOTICE: Due to a lapse in annual appropriations, most of this website is not being updated. Learn more.

Form submissions will still be accepted but will not receive responses at this time. Sections of this site for programs using non-appropriated funds (such as NVLAP) or those that are excepted from the shutdown (such as CHIPS and NVD) will continue to be updated.

U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

An Optomechanical Accelerometer with a High-Finesse Hemispherical Optical Cavity

Published

Author(s)

Yiliang Bao, Felipe Guzman, Arvind Balijepalli, John Lawall, Jacob Taylor, Thomas W. LeBrun, Jason J. Gorman

Abstract

A new design for an optomechanical accelerometer is presented. The design includes a hemispherical optical cavity that can achieve high finesse and a proof mass that is well-constrained by silicon nitride beams. Based on previous work and analysis, the resolution of the accelerometer will be below 1 μg/rt-Hz. Novel MEMS fabrication processes have been developed for the accelerometer that provide optimized optical and mechanical elements. The optical cavity in the accelerometer has been characterized and a tunable laser has been locked to the cavity, thereby demonstrating the possibility for closed-loop operation of the accelerometer.
Proceedings Title
IEEE International Symposium on Inertial Sensors and Systems
Conference Dates
February 23-25, 2016
Conference Location
Laguna Beach, CA, US

Keywords

accelerometer, MEMS, Fabry-Perot, optical cavity

Citation

Bao, Y. , Guzman, F. , Balijepalli, A. , Lawall, J. , Taylor, J. , LeBrun, T. and Gorman, J. (2016), An Optomechanical Accelerometer with a High-Finesse Hemispherical Optical Cavity, IEEE International Symposium on Inertial Sensors and Systems, Laguna Beach, CA, US, [online], https://doi.org/10.1109/ISISS.2016.7435556, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920261 (Accessed October 17, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created February 22, 2016, Updated April 1, 2022
Was this page helpful?