Bao, Y.
, Guzman, F.
, Balijepalli, A.
, Lawall, J.
, Taylor, J.
, LeBrun, T.
and Gorman, J.
(2016),
An Optomechanical Accelerometer with a High-Finesse Hemispherical Optical Cavity, IEEE International Symposium on Inertial Sensors and Systems, Laguna Beach, CA, US, [online], https://doi.org/10.1109/ISISS.2016.7435556, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920261
(Accessed October 14, 2024)
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An Optomechanical Accelerometer with a High-Finesse Hemispherical Optical Cavity
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Abstract
A new design for an optomechanical accelerometer is presented. The design includes a hemispherical optical cavity that can achieve high finesse and a proof mass that is well-constrained by silicon nitride beams. Based on previous work and analysis, the resolution of the accelerometer will be below 1 μg/rt-Hz. Novel MEMS fabrication processes have been developed for the accelerometer that provide optimized optical and mechanical elements. The optical cavity in the accelerometer has been characterized and a tunable laser has been locked to the cavity, thereby demonstrating the possibility for closed-loop operation of the accelerometer.Proceedings Title
IEEE International Symposium on Inertial Sensors and Systems
Conference Dates
February 23-25, 2016
Conference Location
Laguna Beach, CA, US
Pub Type
Conferences
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Keywords
accelerometer, MEMS, Fabry-Perot, optical cavity
Citation
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Created February 22, 2016, Updated April 1, 2022