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An Optomechanical Accelerometer with a High-Finesse Hemispherical Optical Cavity
Published
Author(s)
Yiliang Bao, Felipe Guzman, Arvind Balijepalli, John Lawall, Jacob Taylor, Thomas W. LeBrun, Jason J. Gorman
Abstract
A new design for an optomechanical accelerometer is presented. The design includes a hemispherical optical cavity that can achieve high finesse and a proof mass that is well-constrained by silicon nitride beams. Based on previous work and analysis, the resolution of the accelerometer will be below 1 μg/rt-Hz. Novel MEMS fabrication processes have been developed for the accelerometer that provide optimized optical and mechanical elements. The optical cavity in the accelerometer has been characterized and a tunable laser has been locked to the cavity, thereby demonstrating the possibility for closed-loop operation of the accelerometer.
Proceedings Title
IEEE International Symposium on Inertial Sensors and Systems
Bao, Y.
, Guzman, F.
, Balijepalli, A.
, Lawall, J.
, Taylor, J.
, LeBrun, T.
and Gorman, J.
(2016),
An Optomechanical Accelerometer with a High-Finesse Hemispherical Optical Cavity, IEEE International Symposium on Inertial Sensors and Systems, Laguna Beach, CA, US, [online], https://doi.org/10.1109/ISISS.2016.7435556, https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=920261
(Accessed October 17, 2025)