An Optomechanical Accelerometer with a High-Finesse Hemispherical Optical Cavity
Yiliang Bao, Felipe Guzman, Arvind K. Balijepalli, John R. Lawall, Jacob M. Taylor, Thomas W. LeBrun, Jason J. Gorman
A new design for an optomechanical accelerometer is presented. The design includes a hemispherical optical cavity that can achieve high finesse and a proof mass that is well-constrained by silicon nitride beams. Based on previous work and analysis, the resolution of the accelerometer will be below 1 μg/rt-Hz. Novel MEMS fabrication processes have been developed for the accelerometer that provide optimized optical and mechanical elements. The optical cavity in the accelerometer has been characterized and a tunable laser has been locked to the cavity, thereby demonstrating the possibility for closed-loop operation of the accelerometer.
IEEE International Symposium on Inertial Sensors and Systems