Parametric resonance in linear microresonators using analog feedback

Published: January 21, 2018

Author(s)

Jason J. Gorman, Vikrant J. Gokhale

Abstract

This paper reports on the design and implementation of an analog feedback controller for generating parametric resonance in linear microresonators that do not intrinsically demonstrate this phenomenon. It is shown that the controller produces a fundamental parametric resonance in a piezoelectric microresonator that is qualitatively similar to those found in MEMS resonators with intrinsic parametric resonances. The design of the controller is simple and has the potential to work with most resonators, even in the radio frequency range. As a result, it is possible to make use of parametric resonances in high-frequency, high quality factor resonators for oscillator applications in sensing, timing, and frequency control.
Proceedings Title: IEEE International Conference on Micro Electro Mechanical Systems(MEMS 2018)
Conference Dates: January 21-25, 2018
Conference Location: Belfast, -1
Pub Type: Conferences

Keywords

Parametric resonance, MEMS, resonator, feedback
Created January 21, 2018, Updated November 10, 2018