Parametric resonance in linear microresonators using analog feedback
Jason J. Gorman, Vikrant J. Gokhale
This paper reports on the design and implementation of an analog feedback controller for generating parametric resonance in linear microresonators that do not intrinsically demonstrate this phenomenon. It is shown that the controller produces a fundamental parametric resonance in a piezoelectric microresonator that is qualitatively similar to those found in MEMS resonators with intrinsic parametric resonances. The design of the controller is simple and has the potential to work with most resonators, even in the radio frequency range. As a result, it is possible to make use of parametric resonances in high-frequency, high quality factor resonators for oscillator applications in sensing, timing, and frequency control.
IEEE International Conference on Micro Electro Mechanical Systems(MEMS 2018)