A combination of optical knife-edge and photoelastic modulation measurement techniques are presented, which are used to measure dynamic displacement and strain at various points on in-plane bulk acoustic resonators. These techniques can characterize in-plane high-frequency vibration with a degree of precision and simplicity that has not been shown previously. The measurements are spatially resolved and can be used to reconstruct the vibrational mode shape of the resonator. Experimental results presented here are acquired using both methods on a pure silicon bulk acoustic resonator (SiBAR) with a fundamental resonance frequency of 13.6 MHz.
Hilton Head Workshop 2016: A Solid-State Sensors, Actuators and Microsystems Workshop
June 6-9, 2016
Hilton Head, SC
Microelectromechanical systems, resonator, modal analysis, knife-edge, photoelastic effect