Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

MEMS Nanopositioners

Published

Author(s)

Jason J. Gorman

Abstract

This book chapter provides a review of the state of the art for MEMS nanopositioners. The motivation for MEMS nanopositioners is presented with respect to the advantages of this technology compared to macroscale mechanisms and the novel applications that they enable. The relative advantages and disadvantages of the actuators and sensors used in MEMS nanopositioners are then discussed. This is followed by an analysis of the performance of these devices in terms of resolution, range, bandwidth, and size.
Citation
Nanopositioning Technologies: Fundamentals and Applications
Publisher Info
Springer Science+Business Media, New York, NY

Keywords

MEMS, microelectromechanical systems, nanopositioner, motion control

Citation

Gorman, J. (2016), MEMS Nanopositioners, Nanopositioning Technologies: Fundamentals and Applications, Springer Science+Business Media, New York, NY, [online], https://doi.org/10.1007/978-3-319-23853-1 (Accessed June 18, 2024)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created January 1, 2016, Updated November 10, 2018