This book chapter provides a review of the state of the art for MEMS nanopositioners. The motivation for MEMS nanopositioners is presented with respect to the advantages of this technology compared to macroscale mechanisms and the novel applications that they enable. The relative advantages and disadvantages of the actuators and sensors used in MEMS nanopositioners are then discussed. This is followed by an analysis of the performance of these devices in terms of resolution, range, bandwidth, and size.
Nanopositioning Technologies: Fundamentals and Applications