@inbook{214566, author = {Jason Gorman}, title = {MEMS Nanopositioners}, year = {2016}, month = {2016-01-01}, publisher = {Nanopositioning Technologies: Fundamentals and Applications, Springer Science+Business Media, New York, NY}, doi = {https://doi.org/10.1007/978-3-319-23853-1}, language = {en}, }