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Displaying 57476 - 57500 of 74237

Workshop Report 1: Scanning Electron Microscope Metrology as Related to a Defined Edge Structure

January 1, 1995

Author(s)

Michael T. Postek, Andras Vladar, G Banke, T Reilly

An accurate electron beam model is primary to the understanding of the SEM image. Several independently developed Monte Carlo models have been introduced for this purpose and a modeling round-robin has just been conducted to compare the results of these

X-ray emission from the Sun in its youth and old age

January 1, 1995

Author(s)

J D. Dorren, M G{umlat}del, E F. Guinan

X-Ray Generation and Image Capture: Monoenergetic X-Ray Sources

January 1, 1995

Author(s)

R Deslattes, C -. Tang

X-Rays from Radiative Electron Capture of Free Cooling Electrons for Precise Lamb-Shift Measurements at High Z: Au 78+

January 1, 1995

Author(s)

H F. Beyer, D Liesen, F Bosch, K D. Finlayson, M Jung, O Klepper, R Moshammer, K Beckert, H Eickoff, B Franzke, F Nolden, P Spadtke, M Steck, G Menzel, R Deslattes

Z39.50 implementation experiences:

January 1, 1995

Author(s)

Paul Over, William E Moen, Ray Denenberg, Lennie Stovel

A Monte Carlo Model for SEM Linewidth Metrology

December 31, 1994

Author(s)

J R. Lowney, Michael T. Postek, Andras Vladar

A New Method to Measure the Distance Between Graduation Lines on Graduated Scales

December 31, 1994

Author(s)

William B. Penzes, Richard A. Allen, Michael W. Cresswell, E C. Teague

An Exact Solution of the Steady-State Surface Temperature for a General Multilayer Structure

December 31, 1994

Author(s)

John Albers

Application of the Modified Voltage-Dividing Potentiometer to Overlay Metrology in a CMOS/Bulk Process

December 31, 1994

Author(s)

Richard A. Allen, Michael W. Cresswell, Loren W. Linholm, Jinsheng Wen, Colleen E. Hood, T. A. Hill, J. D. Benecke, S. R. Volk, H. D. Stewart

Characterization of LPE HgCdTe Films by Magnetoresistance

December 31, 1994

Author(s)

Jin S. Kim, David G. Seiler, Luigi Colombo

Characterization of Two-Dimensional Dopant Profiles: Status and Review, Extended Abstracts

December 31, 1994

Author(s)

Alain C. Diebold, M. Kump, Joseph Kopanski, David G. Seiler

Cryogenic Precision Capacitance Bridge Using a Single Electron Tunneling Electrometer

December 31, 1994

Author(s)

R. N. Ghosh, Alan F. Clark, B. A. Sanborn, Edwin R. Williams

Defect Formation Mechanism Causing Increasing Defect Density During Decreasing Implant Dose In Low-Dose SIMOX

December 31, 1994

Author(s)

J. H. Lee, J Park, S. J. Krause, Peter Roitman

Defect Pair Formation by Implantation-Induced Stresses In High-Dose-Oxygen-Implanted-Silicon

December 31, 1994

Author(s)

J. H. Lee, J Park, D. Venables, S. J. Krause, Peter Roitman

Development of a Standard Reference Material for Measurement of Interstitial Oxygen Concentration in Semiconductor Silicon by Infrared Absorption

December 31, 1994

Author(s)

Brian G. Rennex, James R. Ehrstein, Robert I. Scace

Effect of Anneal Temperature on Si/Buried Oxide Interface Roughness of SIMOX

December 31, 1994

Author(s)

C. Jacobs, A. Genis, L. P. Allen, Peter Roitman

Effect of Implantation Conditions on Defect Microstructure in Annealed SIMOX

December 31, 1994

Author(s)

J. H. Lee, J Park, S. J. Krause, D. Venables, Peter Roitman

Effect of Nitrogen Ambients During High-Temperature SIMOX Annealing

December 31, 1994

Author(s)

Peter Roitman, Santos D. Mayo, David S. Simons, S. J. Krause, J Park, J. H. Lee, D. Venables, Patrick M. Lenahan, J. F. Conley

Effect of Single vs. Multiple Implant Processing on Defect Types and Densities in SIMOX

December 31, 1994

Author(s)

D. Venables, S. J. Krause, J Park, J. H. Lee, Peter Roitman

Electrical Characterization of Liquid-Phase Epitaxially Grown Single-Crystal Films of Mercury Cadmium Telluride by Variable-Magnetic-Field Hall Measurements

December 31, 1994

Author(s)

Jin S. Kim, David G. Seiler, Luigi Colombo, M. C. Chen

Electrical Characterization of Narrow Gap n-Type Bulk HgCdTe Single Crystals by Variable-Magnetic-Field Hall Measurements and Reduced Conductivity-Tensor Analyses

December 31, 1994

Author(s)

Jin S. Kim, David G. Seiler, R. A. Lancaster, M. B. Reine

Electrical Test Structure for Overlay Metrology Referenced to Absolute Length Standards

December 31, 1994

Author(s)

Michael W. Cresswell, William B. Penzes, Richard A. Allen, Loren W. Linholm, Colleen E. Hood, E C. Teague

Electron Beam Interaction Modeling as Applied to X-Ray Lithography Mask SEM Linewidth Metrology

December 31, 1994

Author(s)

Michael T. Postek, J R. Lowney, Andras Vladar, William J. Keery, E Marx, Robert D. Larrabee

Experimental Investigation of the Validity of TDDB Voltage Acceleration Models

December 31, 1994

Author(s)

John S. Suehle, P Chaparala, C. Messick, W. Wyatt Miller, K. C. Boyko

Field and Temperature Acceleration of Time-Dependent Dielectric Breakdown in Intrinsic Thin SiO 2

December 31, 1994

Author(s)

John S. Suehle, P Chaparala, C. Messick, W. Wyatt Miller, K. C. Boyko

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