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Development of a Standard Reference Material for Measurement of Interstitial Oxygen Concentration in Semiconductor Silicon by Infrared Absorption
Published
Author(s)
Brian G. Rennex, James R. Ehrstein, Robert I. Scace
Proceedings Title
Extended Abstracts of the Electrochemical Society
Conference Dates
October 9-14, 1994
Conference Location
Miami Beach, FL, USA
Pub Type
Conferences
Citation
Rennex, B.
, Ehrstein, J.
and Scace, R.
(1994),
Development of a Standard Reference Material for Measurement of Interstitial Oxygen Concentration in Semiconductor Silicon by Infrared Absorption, Extended Abstracts of the Electrochemical Society, Miami Beach, FL, USA
(Accessed October 15, 2025)