@conference{761326,
  author = {Brian Rennex and James Ehrstein and Robert Scace},
  title = {Development of a Standard Reference Material for Measurement of Interstitial Oxygen Concentration in Semiconductor Silicon by Infrared Absorption},
  year = {1994},
  month = {1994-12-31 00:12:00},
  publisher = {Extended Abstracts of the Electrochemical Society, Miami Beach, FL, USA},
  language = {en},
}