Lee, J.
, Park, J.
, Krause, S.
and Roitman, P.
(1994),
Defect Formation Mechanism Causing Increasing Defect Density During Decreasing Implant Dose In Low-Dose SIMOX, Proc., 1994 IEEE SOI Conference, Nantucket, MA, USA
(Accessed March 13, 2025)
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Defect Formation Mechanism Causing Increasing Defect Density During Decreasing Implant Dose In Low-Dose SIMOX
Published
Author(s)
J. H. Lee, J Park, S. J. Krause,
Proceedings Title
Proc., 1994 IEEE SOI Conference
Conference Dates
October 4-6, 1994
Conference Location
Nantucket, MA, USA
Pub Type
Conferences
Citation
Issues
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Created December 30, 1994, Updated October 12, 2021