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Defect Formation Mechanism Causing Increasing Defect Density During Decreasing Implant Dose In Low-Dose SIMOX

Published

Author(s)

J. H. Lee, J Park, S. J. Krause, Peter Roitman
Proceedings Title
Proc., 1994 IEEE SOI Conference
Conference Dates
October 4-6, 1994
Conference Location
Nantucket, MA, USA

Citation

Lee, J. , Park, J. , Krause, S. and Roitman, P. (1994), Defect Formation Mechanism Causing Increasing Defect Density During Decreasing Implant Dose In Low-Dose SIMOX, Proc., 1994 IEEE SOI Conference, Nantucket, MA, USA (Accessed April 21, 2024)
Created December 30, 1994, Updated October 12, 2021