@conference{767896,
  author = {J. Lee and J Park and S. Krause and Peter Roitman},
  title = {Defect Formation Mechanism Causing Increasing Defect Density During Decreasing Implant Dose In Low-Dose SIMOX},
  year = {1994},
  month = {1994-12-31 00:12:00},
  publisher = {Proc.,  1994 IEEE SOI Conference, Nantucket, MA, USA},
  language = {en},
}