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Effect of Single vs. Multiple Implant Processing on Defect Types and Densities in SIMOX

Published

Author(s)

D. Venables, S. J. Krause, J Park, J. H. Lee, Peter Roitman
Proceedings Title
Proc., 1993 IEEE SOI Conference
Conference Dates
October 4-7, 1993
Conference Location
Palm Springs, CA, USA

Citation

Venables, D. , Krause, S. , Park, J. , Lee, J. and Roitman, P. (1994), Effect of Single vs. Multiple Implant Processing on Defect Types and Densities in SIMOX, Proc., 1993 IEEE SOI Conference, Palm Springs, CA, USA (Accessed April 15, 2024)
Created December 30, 1994, Updated October 12, 2021