Venables, D.
, Krause, S.
, Park, J.
, Lee, J.
and Roitman, P.
(1994),
Effect of Single vs. Multiple Implant Processing on Defect Types and Densities in SIMOX, Proc., 1993 IEEE SOI Conference, Palm Springs, CA, USA
(Accessed September 16, 2024)
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Effect of Single vs. Multiple Implant Processing on Defect Types and Densities in SIMOX
Published
Author(s)
D. Venables, S. J. Krause, J Park, J. H. Lee,
Proceedings Title
Proc., 1993 IEEE SOI Conference
Conference Dates
October 4-7, 1993
Conference Location
Palm Springs, CA, USA
Pub Type
Conferences
Citation
Issues
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Created December 30, 1994, Updated October 12, 2021