@conference{767551,
  author = {D. Venables and S. Krause and J Park and J. Lee and Peter Roitman},
  title = {Effect of Single vs. Multiple Implant Processing on Defect Types and Densities in SIMOX},
  year = {1994},
  month = {1994-12-31 00:12:00},
  publisher = {Proc.,  1993 IEEE SOI Conference, Palm Springs, CA, USA},
  language = {en},
}