U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

PUBLICATIONS

Effect of Anneal Temperature on Si/Buried Oxide Interface Roughness of SIMOX

Published

Author(s)

C. Jacobs, A. Genis, L. P. Allen, Peter Roitman
Proceedings Title
Proc., 1994 IEEE SOI Conference
Conference Dates
October 4-6, 1994
Conference Location
Nantucket, MA, USA
Pub Type
Conferences

Citation

Jacobs, C. , Genis, A. , Allen, L. and Roitman, P. (1994), Effect of Anneal Temperature on Si/Buried Oxide Interface Roughness of SIMOX, Proc., 1994 IEEE SOI Conference, Nantucket, MA, USA (Accessed April 27, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.

Created December 30, 1994, Updated October 12, 2021