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PUBLICATIONS

Electrical Test Structure for Overlay Metrology Referenced to Absolute Length Standards

Published

Author(s)

Michael W. Cresswell, William B. Penzes, Richard A. Allen, Loren W. Linholm, Colleen E. Hood, E C. Teague
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control VIII
Volume
2196
Conference Location
San Jose, CA, USA
Pub Type
Conferences

Citation

Cresswell, M. , Penzes, W. , Allen, R. , Linholm, L. , Hood, C. and Teague, E. (1994), Electrical Test Structure for Overlay Metrology Referenced to Absolute Length Standards, Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control VIII, San Jose, CA, USA (Accessed November 2, 2025)

Issues

If you have any questions about this publication or are having problems accessing it, please contact [email protected].

Created December 30, 1994, Updated October 12, 2021
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