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Electrical Test Structure for Overlay Metrology Referenced to Absolute Length Standards

Published

Author(s)

Michael W. Cresswell, William B. Penzes, Richard A. Allen, Loren W. Linholm, Colleen E. Hood, E C. Teague
Proceedings Title
Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control VIII
Volume
2196
Conference Location
San Jose, CA, USA

Citation

Cresswell, M. , Penzes, W. , Allen, R. , Linholm, L. , Hood, C. and Teague, E. (1994), Electrical Test Structure for Overlay Metrology Referenced to Absolute Length Standards, Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control VIII, San Jose, CA, USA (Accessed April 12, 2024)
Created December 30, 1994, Updated October 12, 2021