TY  - CONF
AU  - Michael Cresswell
AU  - William Penzes
AU  - Richard Allen
AU  - Loren Linholm
AU  - Colleen Hood
AU  - E Teague
C2  - Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control VIII, San Jose, CA, USA
DA  - 1994-12-31 00:12:00
LA  - en
M1  - 2196
PB  - Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control VIII, San Jose, CA, USA
PY  - 1994
TI  - Electrical Test Structure for Overlay Metrology Referenced to Absolute Length Standards
ER  -