@conference{846871,
  author = {Michael Cresswell and William Penzes and Richard Allen and Loren Linholm and Colleen Hood and E Teague},
  title = {Electrical Test Structure for Overlay Metrology Referenced to Absolute Length Standards},
  year = {1994},
  number = {2196},
  month = {1994-12-31 00:12:00},
  publisher = {Proc. Intl. Soc. for Optical Engineering (SPIE), Integrated Circuit Metrology, Inspection, and Process Control VIII, San Jose, CA, USA},
  language = {en},
}