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Conferences

Odyssey Text Independent Evaluation Data

Author(s)
Mark A. Przybocki, Alvin F. Martin
We discuss the text-independent data supplied for the 2001: A Speaker Odyssey evaluation track. We cover the data creation and selection process, and we present

Cu Electrodeposition for On-Chip Interconnections

Author(s)
Gery R. Stafford, Thomas P. Moffat, V D. Jovic, David R. Kelley, John E. Bonevich, Daniel Josell, Mark D. Vaudin, N G. Armstrong, W H. Huber, A Stanishevsky
The electrochemical behavior of copper in copper sulfate - sulfuric acid, containing various combinations of NaCl, sodium 3 mercapto-1 propanesulfonate (MPSA)

A Metamodeling Approach to Evolution

Author(s)
M N. Terrasse
With the increasing complexity of systems being modeled, analysis and design move towards more and more abstract methodologies. Most of them rely on

SEM Sentinel - SEM Performance Measurement System

Author(s)
Bradley N. Damazo, Andras Vladar, Alice V. Ling, M A. Donmez, Michael T. Postek, Crossley E. Jayewardene
This paper describes the design and implementation of a system for monitoring the performance of a critical dimension measurement scanning electron microscope

Sapphire Statistical Characterization and Risk Reduction Program

Author(s)
Donald McClure, Robert Cayse, David R. Black, Steven Goodrich, K Lagerloef, D Peter, Daniel C. Harris, Dale McCullum, Daniel H. Platus, Charles E. Patty, Robert S. Polvani
The Sapphire Statistical Characterization and Risk Reduction Program tested 1400 4-point flexure bars with different crystal orientations at different

Kinematic Modeling and Analysis of a Planar Micro-Positioner

Author(s)
Nicholas G. Dagalakis, John A. Kramar, E Amatucci, Robert Bunch
The static and dynamic performance of a control system depends on the accuracy of the mathematical model of the plant that is being controlled. In this work

Domain Stability in PZT Thin Films

Author(s)
Grady S. White, J Blendell, Lin-Sien H. Lum
M measurements were made on textured PZT thin films excited by a 1 V rms in the presence of various DC biasing voltages. Apparent domain pinning sites were
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