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Kinematic Modeling and Analysis of a Planar Micro-Positioner



Nicholas G. Dagalakis, John A. Kramar, E Amatucci, Robert Bunch


The static and dynamic performance of a control system depends on the accuracy of the mathematical model of the plant that is being controlled. In this work, the accuracies of a linear and a second-order kinematic model were evaluated for a two-dimensional, planar, micro-positioner plant. The model performances were evaluated for a variety of testing conditions including a variation of the number of test points, the addition of sensor noise, and six different least-squares fitting algorithms. In general, decreasing the number of fitting points or increasing the noise results in worse performance, as expected. The second-order model was better for low noise and larger data sets, but was worse under the more challenging conditions. All but one of the least-squares algorithms performed similarly well.
Conference Dates
November 10-15, 2001
Conference Location
Arlington, VA
Conference Title
Proceedings of the American Society for Precision Engineering


Kinematic, Micro-positioner, Model, Performance


Dagalakis, N. , Kramar, J. , Amatucci, E. and Bunch, R. (2001), Kinematic Modeling and Analysis of a Planar Micro-Positioner, Proceedings of the American Society for Precision Engineering, Arlington, VA (Accessed March 2, 2024)
Created January 1, 2001, Updated February 19, 2017