@conference{189231, author = {Nicholas Dagalakis and John Kramar and E Amatucci and Robert Bunch}, title = {Kinematic Modeling and Analysis of a Planar Micro-Positioner}, year = {2001}, number = {25}, month = {2001-01-01}, publisher = {Proceedings of the American Society for Precision Engineering, Arlington, VA}, language = {en}, }