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Characterizing Interfacial Roughness by Light Scattering Ellipsometry, ed. by D.G. Seiler, A.C. Diebold, T.J. Shaffner, R. McDonald, W.M. Bullis, P.J. Smith, and E.M. Secula

Published

Author(s)

Thomas A. Germer
Proceedings Title
Characterization and Metrology for ULSI Technology: 2000 International Conference
Conference Dates
June 26-29, 2000
Conference Location
Gaithersburg, WA
Conference Title
Proc. AIP 550

Citation

Germer, T. (2001), Characterizing Interfacial Roughness by Light Scattering Ellipsometry, ed. by D.G. Seiler, A.C. Diebold, T.J. Shaffner, R. McDonald, W.M. Bullis, P.J. Smith, and E.M. Secula, Characterization and Metrology for ULSI Technology: 2000 International Conference, Gaithersburg, WA (Accessed May 26, 2024)

Issues

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Created January 1, 2001, Updated February 17, 2017