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Conferences

Current Projects of ISO Technical Committee 201 on Surface Chemical Analysis

February 1, 2001

Author(s)

Cedric J. Powell

An overview is given of current work projects of Technical Committee 201 on Surface Chemical Analysis of the International Organization for Standardization (ISO...

Effect of Burst-Splitting Events on Phase Doppler Interferometry Measurements

February 1, 2001

Author(s)

J F. Widmann, Cary Presser, Stefan D. Leigh

Evanescent-Wave Cavity Ring-down Spectroscopy for Trace Water Detection

February 1, 2001

Author(s)

A C. Pipino, Joseph T. Hodges

We explore the use of evanescent wave cavity ring-down spectroscopy (EW-CRDS) for water detection through a signal-to-noise ratio analysis. Cavity ring-down...

Intensity Artifacts in Gas Phase FTIR Spectroscopy: Focus on the Aperture

February 1, 2001

Author(s)

S W. Sharpe, R L. Sams, T J. Johnson, Pamela M. Chu

Effects of Stoichiometry and Epoxy Molecular Mass on Wettability and Interfacial Microstructures of Amine-Cured Epoxies

February 1, 2001

Author(s)

M Giraud, Tinh Nguyen, Xiaohong Gu, Mark R. VanLandingham

The effects of stoichiometry and epoxy molecular mass on surface and interfacial microstructures and wettability of amine-cured epoxies have been investigated...

Characterization of Coating System Interphases with Phase Imaging AFM

February 1, 2001

Author(s)

Tinh Nguyen, Xiaohong Gu, Mark R. VanLandingham, M Giraud, R Dutruc-Rosset, R Ryntz, D Nguyen

The interphase between a polymer film and a substrate controls the adhesion and durability of a variety of polymeric systems including adhesives, coatings on...

Nanomechanical Characterization of Polymers Using Scanning Probe Microscopes

February 1, 2001

Author(s)

Mark R. VanLandingham

Scanning probe microscopy (SPM) has been used to study polymeric materials with nanometer spatial resolution. Indentation methods based on SPM technology...

Research on Sealant at the National Institute of Standards and Technology: Past and Present

February 1, 2001

Author(s)

Christopher C. White

The standard test method for evaluating sealant performance is the ASTM C719, which resulted from the pioneering work of NIST researcher Authur Hockman. This...

Exploring Site Quality Above 1 GHz Using Double Ridged Horns

February 1, 2001

Author(s)

Dennis G. Camell, Robert T. Johnk, K. R. Hall

This is a summary of recent exploratory efforts conducted by the American National Standards Institute (ANSI) Accredited Standards Committee C63, Sub-Committee...

Imaging of Multi-Fiber, Micro-Mechanical Testing Specimens Using Optical Coherence Tomography

February 1, 2001

Author(s)

Joy P. Dunkers, Gale A. Holmes, Walter G. McDonough

In this initial work, we interfaced a micro-mechanical testing stage with the optical coherence tomography (OCT) instrument. We then demonstrated the...

Fabrication and Electron Microprobe Characterization of Barium-Strontium-Titanate (BST) Films

February 1, 2001

Author(s)

Ryna B. Marinenko, J T. Armstrong, Debra L. Kaiser, Joseph J. Ritter, Peter K. Schenck, C P. Bouldin, J Blendell, Igor Levin

Barium strontium titanate (BST) thin films of varying composition and thickness (5nm to 400nm) on (100)Si or Pt/(100)Si substrates were measured using an...

A Novel Microshear Test to Measure Dental Adhesion

February 1, 2001

Author(s)

Joseph M. Antonucci, Walter G. McDonough, Gary E. Schumacher, Y Shimada

A key factor in determining the strength and durability of polymeric dental restorative composites, sealants and adhesives is the quality of their interfaces...

Analysis of Behavioral Requirements for Component-Based Machine Controllers

February 1, 2001

Author(s)

Frederick M. Proctor, John L. Michaloski, S Birla, G Weinert

Machine controllers built from standardized software components have the greatest potential to reap open architecture benefits - including plug-and-play...

Integrating Active Tangible Devices With a Synthetic Environment for Collaborative Engineering

February 1, 2001

Author(s)

Sanford P. Ressler, Brian Antonishek, Quandou (. Wang, Afzal A. Godil

This paper describes the creation of an environment for collaborative engineering. in which the goal is to improve the user interface by using haptic...

Prediction of the [Na_1/2Bi_1/2] TiO₃ Ground State

February 1, 2001

Author(s)

Benjamin P. Burton, Eric J. Cockayne

The Vienna Ab-initio Simulation Package (VASP) was used to perform fully relaced, planeware psudopotential calculations of formation energies (δE V ASP) for a...

Structure and Property Characterization of Porous Low-k Dielectric Constant Thin Films Using X-ray Reflectivity and Small Angle Neutron Scattering

February 1, 2001

Author(s)

Eric K. Lin, Wen-Li Wu, C Jin, J T. Wetzel

A novel methodology using a combination of high energy ion scattering, x-ray reflectivity, and small angle neutron scattering is developed to characterize the...

Fiber Optic Based Optical Tomography Sensor for Monitoring Plasma Uniformity

February 1, 2001

Author(s)

Eric C. Benck, K Etemadi

A new type of fiber optic based optical tomography sensor has been developed for potential in situ monitoring of plasma uniformity. Optical tomography inverts...

Exploring a Quantum Degenerate Fermi Gas

February 1, 2001

Author(s)

Deborah S. Jin, B. L. DeMarco, S Papp

We discuss the production and study of a quantum degenerate Fermi gas of atoms. The fundamental difficulty in cooling a gas of fermionic atoms is the lack of...

High Precision Measurements of Arsenic Implantation Dose in Silicon by Secondary Ion Mass Spectrometry

February 1, 2001

Author(s)

P Chi, David S. Simons, J M. McKinley, F A. Stevie, C N. Granger

The Metrology section of the 1999 International Technology Roadmap for Semiconductors (ITRS) specifies in-line dopant profile concentration precision...

Investigation and Control of Spatial Characteristics of Chamber-Cleaning Plasmas

February 1, 2001

Author(s)

Kristen L. Steffens, Mark A. Sobolewski

Planar laser-induced fluorescence (PLIF) measurements were made to determine 2-D spatial maps of CF2 density as a chemical marker of plasma uniformity in 9%O2...

Monitoring Ion Current and Ion Energy During Plasma Processing Using Radio-Frequency Current and Voltage Measurements

February 1, 2001

Author(s)

Mark A. Sobolewski

To obtain optimal results from plasma processing, the energy of ions incident on the substrate and their current or flux must be carefullymonitored and...

Comparison of High- and Low-Voltage X-Ray Mapping of an Electronic Device

February 1, 2001

Author(s)

John A. Small, David S. Bright

In recent years, field-emission gun scanning electron microscopes, FEG-SEMs, with high-brightness electron guns and excellent performance at low electron beam...

A Numerical/Experimental Investigation of Microcontamination in a Rotating Disk Chemical Vapor Deposition Reactor

February 1, 2001

Author(s)

R W. Davis, Elizabeth F. Moore, James E. Maslar, Donald R. Burgess Jr., D M. Kremer, S H. Ehrman

Driven by a relentless decrease in feature size, the allowable particle contaminant size during semiconductor fabrication is now less than 100 nm. Particles in...

Measurement of Silicon Dioxide Film Thicknesses by X-ray Photoelectron Spectroscopy

February 1, 2001

Author(s)

Cedric J. Powell, Aleksander Jablonski

It is now customary for the effects of elastic-electron scattering to be ignored in measurements of the thicknesses of overlayer films by X-ray photoelectron...

Documentary and Physical Standards for Surface Finish and Imperfections

February 1, 2001

Author(s)

Theodore V. Vorburger

Surface finish and imperfections are important properties of optical surfaces because they are caused by manufacturing limitations or defects and are linked to...

Controller-Driven VRML Animation of the Next-Generation Inspection System (NGIS) Real-time Controller

February 1, 2001

Author(s)

Keith A. Stouffer, John A. Horst

Virtual objects in a web-based environment can be interfaced to and controlled by external real world controllers. A Virtual Reality Modeling Language (VRML)...

Measuring Antennas Above 1 GHz

February 1, 2001

Author(s)

Michael Windler, Dennis G. Camell

The techniques for EMC measurements used with antennas above 1 GHz have been gleaned from methods used at lower frequencies. The assumptions made in applying...

⁸⁵Rb BEC Near a Feshbach Resonance

February 1, 2001

Author(s)

N R. Claussen, S L. Cornish, J L. Roberts, Eric A. Cornell, C E. Wieman

Bose-Einstein condensation has been achieved in a magnetically trapped sample of 85Rb atoms. Stable condensates of up to 10 4 atoms have been created by using a...

XML Representation of EXPRESS Models and Data

February 1, 2001

Author(s)

Joshua Lubell, Edward J. Barkmeyer Jr.

EXPRESS is a modeling language for use in engineering data exchange standards that combines the entity-attribute-relationship and object modeling paradigms...

Fast C2D: Software for Extracting 2D Carrier Profiles from Scanning Capacitance Microscopy Images

February 1, 2001

Author(s)

Brian G. Rennex, Joseph Kopanski, Jay F. Marchiando

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