Kondoh, E.
, Baklanov, M.
, Lin, E.
, Gidley, D.
and Nakashima, A.
(2001),
Comparative Study of Pore Size of Low-Dielectric-Constant Porous Spin-On-Glass Films With Different Methods of Nondestructive Instrumentation, Ultrasonic Electronics, Proceedings of the Symposium on | | | Japanese Journal of Applied Physics, Undefined
(Accessed October 13, 2024)