TY  - CONF
AU  - E Kondoh
AU  - M Baklanov
AU  - Eric Lin
AU  - D Gidley
AU  - A Nakashima
C2  - Ultrasonic Electronics, Proceedings of the Symposium on | | | Japanese Journal of Applied Physics, Undefined
DA  - 2001-04-01 00:04:00
LA  - en
M1  - 40
PB  - Ultrasonic Electronics, Proceedings of the Symposium on | | | Japanese Journal of Applied Physics, Undefined
PY  - 2001
TI  - Comparative Study of Pore Size of Low-Dielectric-Constant Porous Spin-On-Glass Films With Different Methods of Nondestructive Instrumentation
ER  -