@conference{796746,
  author = {E Kondoh and M Baklanov and Eric Lin and D Gidley and A Nakashima},
  title = {Comparative Study of Pore Size of Low-Dielectric-Constant Porous Spin-On-Glass Films With Different Methods of Nondestructive Instrumentation},
  year = {2001},
  number = {40},
  month = {2001-04-01 00:04:00},
  publisher = {Ultrasonic Electronics, Proceedings of the Symposium on | | | Japanese Journal of Applied Physics, Undefined},
  language = {en},
}