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Laser-Ultrasonic Methods for Thin-Film Property Measurements Using High-Frequency Surface Acoustic Waves

Published

Author(s)

Donna C. Hurley, A J. Richards

Abstract

Laser-ultrasonic methods to measure thin-film elastic properties have been developed. Surface acoustic waves (SAWs) were generated by a 0.2 ns pulsed laser and detected by a line-focused Michelson Interferometer with a -3 dB bandwidth of 800 MHz. Waveforms at several propagation distances were used to determine the SAW dispersion relation for a series of titanium nitride film samples. The measurements can be related to thin-film elastic properties using theoretical models.
Proceedings Title
Annual Review of Progress in Quantitative Nondestructive Evaluation | 27th | Review of Progress in Quantitative Nondestructive Evaluation; Volume 20 | AIP
Volume
557
Issue
Pt. A
Conference Dates
July 16-20, 2000
Conference Title
AIP Conference Proceedings

Keywords

laser ultrasonics, surface acoustic waves, thin films

Citation

Hurley, D. and Richards, A. (2001), Laser-Ultrasonic Methods for Thin-Film Property Measurements Using High-Frequency Surface Acoustic Waves, Annual Review of Progress in Quantitative Nondestructive Evaluation | 27th | Review of Progress in Quantitative Nondestructive Evaluation; Volume 20 | AIP (Accessed April 17, 2024)
Created March 1, 2001, Updated February 17, 2017