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Conferences

Integrating Active Tangible Devices With a Synthetic Environment for Collaborative Engineering

February 1, 2001

Author(s)

Sanford P. Ressler, Brian Antonishek, Quandou (. Wang, Afzal A. Godil

This paper describes the creation of an environment for collaborative engineering. in which the goal is to improve the user interface by using haptic...

Prediction of the [Na_1/2Bi_1/2] TiO₃ Ground State

February 1, 2001

Author(s)

Benjamin P. Burton, Eric J. Cockayne

The Vienna Ab-initio Simulation Package (VASP) was used to perform fully relaced, planeware psudopotential calculations of formation energies (δE V ASP) for a...

Structure and Property Characterization of Porous Low-k Dielectric Constant Thin Films Using X-ray Reflectivity and Small Angle Neutron Scattering

February 1, 2001

Author(s)

Eric K. Lin, Wen-Li Wu, C Jin, J T. Wetzel

A novel methodology using a combination of high energy ion scattering, x-ray reflectivity, and small angle neutron scattering is developed to characterize the...

Fiber Optic Based Optical Tomography Sensor for Monitoring Plasma Uniformity

February 1, 2001

Author(s)

Eric C. Benck, K Etemadi

A new type of fiber optic based optical tomography sensor has been developed for potential in situ monitoring of plasma uniformity. Optical tomography inverts...

Exploring a Quantum Degenerate Fermi Gas

February 1, 2001

Author(s)

Deborah S. Jin, B. L. DeMarco, S Papp

We discuss the production and study of a quantum degenerate Fermi gas of atoms. The fundamental difficulty in cooling a gas of fermionic atoms is the lack of...

High Precision Measurements of Arsenic Implantation Dose in Silicon by Secondary Ion Mass Spectrometry

February 1, 2001

Author(s)

P Chi, David S. Simons, J M. McKinley, F A. Stevie, C N. Granger

The Metrology section of the 1999 International Technology Roadmap for Semiconductors (ITRS) specifies in-line dopant profile concentration precision...

Investigation and Control of Spatial Characteristics of Chamber-Cleaning Plasmas

February 1, 2001

Author(s)

Kristen L. Steffens, Mark A. Sobolewski

Planar laser-induced fluorescence (PLIF) measurements were made to determine 2-D spatial maps of CF2 density as a chemical marker of plasma uniformity in 9%O2...

Monitoring Ion Current and Ion Energy During Plasma Processing Using Radio-Frequency Current and Voltage Measurements

February 1, 2001

Author(s)

Mark A. Sobolewski

To obtain optimal results from plasma processing, the energy of ions incident on the substrate and their current or flux must be carefullymonitored and...

Comparison of High- and Low-Voltage X-Ray Mapping of an Electronic Device

February 1, 2001

Author(s)

John A. Small, David S. Bright

In recent years, field-emission gun scanning electron microscopes, FEG-SEMs, with high-brightness electron guns and excellent performance at low electron beam...

A Numerical/Experimental Investigation of Microcontamination in a Rotating Disk Chemical Vapor Deposition Reactor

February 1, 2001

Author(s)

R W. Davis, Elizabeth F. Moore, James E. Maslar, Donald R. Burgess Jr., D M. Kremer, S H. Ehrman

Driven by a relentless decrease in feature size, the allowable particle contaminant size during semiconductor fabrication is now less than 100 nm. Particles in...

Measurement of Silicon Dioxide Film Thicknesses by X-ray Photoelectron Spectroscopy

February 1, 2001

Author(s)

Cedric J. Powell, Aleksander Jablonski

It is now customary for the effects of elastic-electron scattering to be ignored in measurements of the thicknesses of overlayer films by X-ray photoelectron...

Documentary and Physical Standards for Surface Finish and Imperfections

February 1, 2001

Author(s)

Theodore V. Vorburger

Surface finish and imperfections are important properties of optical surfaces because they are caused by manufacturing limitations or defects and are linked to...

Controller-Driven VRML Animation of the Next-Generation Inspection System (NGIS) Real-time Controller

February 1, 2001

Author(s)

Keith A. Stouffer, John A. Horst

Virtual objects in a web-based environment can be interfaced to and controlled by external real world controllers. A Virtual Reality Modeling Language (VRML)...

Measuring Antennas Above 1 GHz

February 1, 2001

Author(s)

Michael Windler, Dennis G. Camell

The techniques for EMC measurements used with antennas above 1 GHz have been gleaned from methods used at lower frequencies. The assumptions made in applying...

⁸⁵Rb BEC Near a Feshbach Resonance

February 1, 2001

Author(s)

N R. Claussen, S L. Cornish, J L. Roberts, Eric A. Cornell, C E. Wieman

Bose-Einstein condensation has been achieved in a magnetically trapped sample of 85Rb atoms. Stable condensates of up to 10 4 atoms have been created by using a...

XML Representation of EXPRESS Models and Data

February 1, 2001

Author(s)

Joshua Lubell, Edward J. Barkmeyer Jr.

EXPRESS is a modeling language for use in engineering data exchange standards that combines the entity-attribute-relationship and object modeling paradigms...

Fast C2D: Software for Extracting 2D Carrier Profiles from Scanning Capacitance Microscopy Images

February 1, 2001

Author(s)

Brian G. Rennex, Joseph Kopanski, Jay F. Marchiando

Gate Oxide Formation under Mild Conditions for Scanning Capacitance Microscopy

February 1, 2001

Author(s)

Duncan McBride, Joseph Kopanski

Scanning Capacitance Microscopy (SCM) can be used to measure doping density in silicon with a spatial resolution of about 10 nm. In order to make such...

Local Electrode Atom Probes: Prospects for 3D Atomic-Scale Metrology Applications in the Semiconductor and Data Storage Industries

February 1, 2001

Author(s)

T F. Kelly, T T. Gribb, R L. Martens, D J. Larson, N Tabat, R J. Matyi, Thomas J. Shaffner

Optical and Electrical Thickness Measurements of Alternate Gate Dielectrics: a Fundamental Difference

February 1, 2001

Author(s)

Curt A. Richter, Nhan Van Nguyen, Evgeni Gusev, T H. Zabel, G A. Alers

We will describe a fundamental difference between the interpretation of optical and electrical measurements of gate dielectric thickness. This difference has...

Light Measuring Device Diagnostics for the Photometric and Colorimetric Measurement of Flying-spot Displays

January 30, 2001

Author(s)

Paul A. Boynton, Edward F. Kelley

Flying-spot displays use narrow-spectrum high-power sources that scan the image across the display screen. They can provide a bright display with a large color...

A Standard Illumination Source for the Evaluation of Display Measurement Methods and Instruments

January 30, 2001

Author(s)

John M. Libert, Paul A. Boynton, Edward F. Kelley, Steven W. Brown, Yoshi Ohno, Farshid Manoocheri

A prototype display measurement assessment transfer standard (DMATS) is being developed by the National Institute of Standards and Technology (NIST) to assist...

Characterization of BPSG films using Neutron Depth Profiling and Neutron/X-ray Reflectometry

January 29, 2001

Author(s)

Huaiyu H. Chen-Mayer, George P. Lamaze, Sushil K. Satija

Energy Dispersive X-ray Analysis using a Microcalorimeter Detector

January 29, 2001

Author(s)

W. Harris, L. Le Tarte, H. Bakhru, W. Gibson, D. Wu, Robert E. Geer, David A. Wollman

Energy dispersive X-ray analysis (EDX) is widely used within the semiconductor community for chemical analysis and identification of features observed in...

Development of a Fire Hazard Assessment Method to Evaluate the Fire Safety of Passenger Trains

January 22, 2001

Author(s)

Richard D. Peacock, Richard W. Bukowski, Paul A. Reneke, Jason D. Averill, S. H. Markos

U.S. passenger train fire safety has historically been addressed primarily through the citation of small-scale flammability and smoke emission tests and...

Recent Advances in Flame Retardant Polymer Nanocomposites

January 22, 2001

Author(s)

Jeffrey W. Gilman, Takashi Kashiwagi, A B. Morgan, Richard H. Harris Jr., L D. Brassell, W H. Awad, Rick D. Davis, L Chyall, T E. Sutto, Paul C. Trulove, H DeLong

A new approach to address the ever increasing demand for higher performance flame retarded products has recently focused on use of mica-type clays nano...

Improved Range Resistors for AC-DC Transfer Measurements

January 18, 2001

Author(s)

H. O. Wolcott, Joseph R. Kinard Jr., Thomas E. Lipe Jr.

This paper discusses the factors contributing to the ac-dc differences of high-voltage thermal converters. A novel resistor designed to minimize these...

CASSCF Investigation of Electronic Excited States of 2-Aminopurine

January 11, 2001

Author(s)

E L. Rachofsky, J B. Ross, Morris Krauss, R Osman

2-aminopurine is a highly fluorescent analog of adenine that can be incorporated synthetically into DNA with little perturbation of the native double-helical...

Long-Term Charge Offset Noise in Coulomb-Blockade Devices

January 9, 2001

Author(s)

William Huber, S Martin, Neil M. Zimmerman

While Coulomb-Blockade devices have shown promise as qubit systems or qubit state detectors, large scale parallelization of these devices is severely hampered...

Toxic Yield

January 7, 2001

Author(s)

William M. Pitts

It is generally recognized that the vast majority of deaths associated with accidental enclosure fires are due to smoke inhalation. Older reviews of autopsy...

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