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Specialized imaging methods with high spatial resolution are essential for advancing the physical understanding of emergent materials in advanced electronics
The exponential growth in the power electronics market requires efficient devices based on wide bandgap (WBG) semiconductors. The yield of power devices is
The project aims to develop the metrology for accurate, reliable characterization of nanostructures using the deep ultraviolet (DUV) and extreme ultraviolet
The information economy – the modern economy that heavily dependent on information gathering, transmitting, processing, storing, utilizing and consuming is
Develop and apply advanced measurement methods, electric field reference materials, and COMSOL models to make electrical scanning probe microscopes (eSPMs)
Carbon nanomaterials such as carbon nanotubes (CNTs) and graphene have an extraordinary combination of mechanical, electronic and thermal properties that make
The electronic properties of a material govern how they will be used in device form. We apply electron-based analytical methods to image the electronic
The state of the art for measurement and inspection of the smallest printed features on an integrated circuits (IC) chip is a combination of electron scanning
This program aims to develop the metrology to enable quantitative assessment of performance limiting reliability issues, and to describe the physics of failure
Advanced bonding and integration physically bring together components, devices, and materials that are produced separately. There are strong economic and
This program aims to develop the metrology to enable quantitative understanding of, and the development of standards, in quality and reliability controls in
Electrochemical processes are ubiquitous. Man-made processes such as energy production by solar cells and battery charging and discharging are examples of
We develop new approaches to optical microscopy and electromagnetic modeling to enable improved metrology of nanoscale structures with dimensions more than an
The project aims to develop the quantum coherence metrology based on single photon state imaging techniques that will elucidate the quantum coherence of single
Key industrial optics-based measurements of nanoscale structures are growing ever-more complex due to increasing device and materials complexity. To meet these
Time-resolved-emission microscopy (TREM) is a workhorse of semiconductor circuit evaluation. However, as transistor dimensions and power-supply voltages have