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Projects/Programs

Displaying 1 - 16 of 16

Advancing PEEM-based Metrology

Ongoing
Specialized imaging methods with high spatial resolution are essential for advancing the physical understanding of emergent materials in advanced electronics

Electrical Scanning Probe Microscopy

Ongoing
Develop and apply advanced measurement methods, electric field reference materials, and COMSOL models to make electrical scanning probe microscopes (eSPMs)

EUV Scatterometry

Ongoing
The state of the art for measurement and inspection of the smallest printed features on an integrated circuits (IC) chip is a combination of electron scanning

Photonic Quantum State Imaging Metrology

Ongoing
The project aims to develop the quantum coherence metrology based on single photon state imaging techniques that will elucidate the quantum coherence of single