Nanoscale Reliability Group

The Nanoscale Reliability Group develops new measurement methods for predicting materials reliability when material and device dimensions are constrained at the micro- and nanoscale and provides instrumentation, test structures, and models for evaluating the critical parameters leading to material failure, including defects, interfaces, and local variations in material properties, as well new techniques for directly evaluating reliability of thin


Projects and Programs


  • Nanoscale Reliability Group
    Bob Keller, Group Leader

    325 Broadway, MS 647
    Boulder, CO 80305-3328
    303-497-7651 Office
    303-497-5030 Fax