Nanoscale Reliability Group

The Nanoscale Reliability Group develops and disseminates science, standards, and technology for high-resolution measurements of material structure, chemistry, and physical properties, to ensure reliability of materials and devices with critical dimensions in the micrometer to nanometer regime.


Projects and Programs


  • Nanoscale Reliability Group
    Bob Keller, Group Leader

    325 Broadway, MS 647
    Boulder, CO 80305-3328
    303-497-7651 Office
    303-497-5030 Fax