Nanoscale Reliability Group

The Nanoscale Reliability Group develops and disseminates science, standards, and technology for high-resolution measurements of material structure, chemistry, and physical properties, to ensure reliability of materials and devices with critical dimensions in the micrometer to nanometer regime.

The performance of advanced, reliable engineering materials requires that the proper atoms are in the correct place within the material, and that they are displaying the properties we intend.  Innovative metrologies are developed in the realms of electron, ion, and scanned probe microscopies, to identify and locate atomic species, and to determine physical responses of materials. Test structures, measurement methods, and in operando approaches are developed to measure performance of complex material systems and geometries with high spatial resolution, enabling new reliability physics to be applied to nanoscale structures for computing, structural material, and energy applications. We integrate our material structure metrologies with material performance and reliability assessments. 

Group Highlight: Transmission SEM in Microscopy Today Feature Article

Researchers from the Nanoscale Reliability Group have been honored with preparing the invited feature article and cover image of the March 2017 issue of Microscopy Today, which is the microscopy field’s highest-circulation trade magazine. This particular issue carries the added significance of celebrating the 75th anniversary of the Microscopy Society of America and the 50th anniversary of the Microanalysis Society.

See Microscopy Today: Jason Holm and Robert R. Keller, “Acceptance Angle Control for Improved Transmission imaging in an SEM,” volume 25, pp. 12-19 (2017). (available online 6 March, 2017).

News and Updates

Projects and Programs


Group Leader