Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Tools and Instruments

Keyword

Organizational Unit

NanoFab Tool: Reactive Ion Etcher Unaxis 790 Right

The Unaxis 790 reactive ion etcher (RIE) is a general purpose parallel plate plasma etching system which uses ionized fluorocarbon gases and oxygen to etch

NanoFab Tool: Reactive Ion Etcher 790 Nitride Left

This PlasmaTherm 790 reactive ion etcher (RIE) is a parallel plate plasma etching system which uses fluorocarbon and oxygen gases to etch silicon nitride thin

Photograph of the Reynolds RCA wet bench.

NanoFab Tool: Reynolds RCA Wet Bench

The Reynolds RCA wet bench is used to remove organic and metal contamination from the surfaces of substrates prior to processing in high temperature furnaces

Photograph of the Reynolds Tech silicon etch wet bench.

NanoFab Tool: Reynolds Tech Silicon Etch Wet Bench

The Reynolds Tech silicon etch wet bench uses dilute potassium hydroxide (KOH) to preferentially etch silicon along the material's crystal planes. The process

$Rigaku SmartLab X-ray Diffraction System$

NanoFab Tool: Rigaku SmartLab X-Ray Diffraction

The Rigaku SmartLab X-ray diffraction system (XRD) is a fully automated, modular system for advanced x-ray diffraction measurements on a wide range of materials

NanoFab Tool: Sandvik Anneal Furnaces

The two Sandvik anneal furnaces, equipped with silicon carbide tubes, support anneal processing in the NanoFab. The anneal furnaces allow nitrogen, argon and

NanoFab Tool: Sandvik LPCVD LTO

The Sandvik low pressure chemical vapor deposition (LPCVD) of silicon oxide furnace supports low temperature oxide (LTO) on substrates ranging from small chips

NanoFab Tool: Sandvik LPCVD Silicon Nitride

The two Sandvik low pressure chemical vapor deposition (LPCVD) silicon nitride furnaces support stoichiometric and low stress silicon nitride deposition on

NanoFab Tool: Sandvik Oxidation Furnaces

The two Sandvik oxidation furnaces, equipped with silicon carbide tubes, support oxidation processing in the NanoFab. The oxidation furnaces support thermal wet

Photograph of the Semitool PSC-101 double stack spin rinse dryer.

NanoFab Tool: Semitool PSC-101 Spin Rinse Dryer

The Semitool PSC-101 spin rinse dryer uses deionized water to rinse and heated nitrogen to dry whole wafer substrates automatically after wet chemical processes

NanoFab Tool: Sensofar Optical Profilometer

The Sensofar optical profilometer is used to measure height variations including step heights and roughness across a surface using light. It uses a

NanoFab Tool: Silanization Oven

The Silanization Oven is available to users in the Soft Lithography Laboratory. This tool supports the mold adhesion and release processes using organosilanes

NanoFab Tool: SSEC Single Wafer Cleaning System 1

The SSEC model 3300ML single wafer spray acid cleaning system supports general SC1 and Piranha processes in the NanoFab cleanroom. This system mixes, heats and

NanoFab Tool: SSEC Single Wafer Cleaning System 2

The SSEC model 3300ML single wafer spray acid cleaning system supports high purity SC1 and Piranha processes in the NanoFab cleanroom. This system mixes, heats

NanoFab Tool: SSEC Single Wafer Cleaning System 3

The SSEC model 3300ML single wafer spray acid cleaning system supports RCA process in the NanoFab cleanroom. This system mixes, heats and delivers chemicals on

NanoFab Tool: Suss MicroTec SB6 Gen 2 Wafer Bonder

The Suss MicroTec SB6 Gen2 wafer bonder is a substrate bonder that’s equipped to handle a wide range of substrate bonding processes. The bonder accommodates

NanoFab Tool: Thermal Thin-Al Evaporator

The Denton “Bench Top Turbo” thermal evaporator is a single source evaporator equipped with substrate rotation, a thickness monitor, and automatic deposition

Photograph of the Tousimis Autosamdri-815 Series B critical point dryer.

NanoFab Tool: Tousimis Autosamdri-815 Series B

The Tousimis Supercritical Autosamdri-815 Series B critical point dryer utilizes liquid carbon dioxide (LCO 2) to dry substrates in a controlled manner in order

Natural Gas Flow Calibration Service

Name(s) of Calibrations/SRMs/SRD/SRIs and any related programs: NIST Special Tests for Natural Gas Flow (18080S) Summary The Fluid Metrology Group (FMG)

NCAL: Digital Image Correlation (DIC) Measurement Systems

Over 10 independent digital image correlation (DIC) measurement systems are available in the NIST Center for Automotive Lightweighting. The majority of these

NCAL: Cruciform Test Machine

A cruciform test machine is available in the NIST Center for Automotive Lightweighting. This machine deforms a cross-shaped specimen with four specimen end tabs

NCAL: Diffraction Stress Measurement Systems

Two independent x-ray diffraction stress measurement systems are available in the NIST Center for Automotive Lightweighting. These systems are integrated with

NCAL: Forming Limit Press

A forming limit press is available in the NIST Center for Automotive Lightweighting. This machine has been designed based on a modified Marciniak punch

NCAL: Intermediate Strain Rate Test Machine

An intermediate strain rate test machine is available in the NIST Center for Automotive Lightweighting. The actuator for this test machine can move at speeds up

NCAL: Octostrain Test Machine

An octostrain (8 tensile arms) test machine is available in the NIST Center for Automotive Lightweighting. By increasing the number of arms from the four used

Was this page helpful?

Advanced communications
-Open Radio Access Network (Open-RAN)
-Quantum communications
-Spectrum sharing
-Wireless (RF)
Bioscience
-Bioeconomy
--Biological data
-Bioimaging
-Bioinformatics
-Biomanufacturing
-Biomaterials
-Biometrology
-Biosecurity
--Biosurveillance
--Genomic cybersecurity
--Nucleic acid sequence screening
-Cell measurements
-Engineering / synthetic biology
--Biofabrication
--Cell-free systems
--Genome engineering
--Protein engineering
-Gene delivery systems
-Genome editing
-Genomics
-Glycomics
-Metabolomics
-Microbial measurements
-Proteomics
-Transcriptomics
Buildings and Construction
-Building codes and standards
-Building control systems
-Building damage and repair
-Building economics
-Building materials
-Energy efficiency
-Heating, ventilation and air conditioning equipment
-Indoor air quality
-Structural engineering
-Thermal comfort
Chemistry
-Analytical chemistry
-Chemical engineering and processing
-Chemical thermodynamics and chemical properties
-Molecular characterization
-Theoretical chemistry and modeling
-Thermochemical properties
Electronics
-Electromagnetics
-Flexible electronics
-Magnetoelectronics
-Optoelectronics
-Organic electronics
-Semiconductors
-Sensors
-Superconducting electronics
Energy
-Alternative energy
-Conventional energy
-Electric power / smart grid
-Fuels
Environment
-Air / water / soil quality
-Climate Measurements
-Environmental health
-Greenhouse gas measurements
-Marine science
-Sustainability
Fire
-Fire detection
-Fire dynamics and science
-Fire fighting
-Fire modeling
-Fire risk reduction
-Materials flammability
-Structural fire resistance
-Wildland urban interface fire
Forensic Science
-Digital evidence
-Drugs and toxicology
-Firearms and toolmarks
-Forensic biometrics
-Forensic genetics
-Trace evidence
Health
-Biopharmaceuticals
-Cell and gene therapy
-Clinical diagnostics
--Cancer
--Medical imaging
-Food and nutrition
-Human microbiome
-Precision medicine
-Regenerative medicine and advanced therapy
--Flow cytometry
Information technology
-Artificial intelligence
--AI measurement and evaluation
--Applied AI
--Fundamental AI
--Hardware for AI
--Machine learning
--Trustworthy and responsible AI
-Biometrics
-Cloud computing and virtualization
-Complex systems
-Computational science
-Conformance testing
-Cyber-physical systems
--Smart cities
-Cybersecurity
--Cryptography
--Cybersecurity education and workforce development
--Cybersecurity measurement
--Identity and access management
--Privacy engineering
--Risk management
--Securing emerging technologies
--Trustworthy networks
--Trustworthy platforms
-Data and informatics
--Human language technology
--Information retrieval
--Natural language processing
-Federal information processing standards (FIPS)
-Health IT
-Internet of Things (IoT)
-Interoperability testing
-Location based services
-Mobile
-Networking
--Mobile and wireless networking
--Network management and monitoring
--Network modeling and analysis
--Network security and robustness
--Network test and measurement
--Next generation networks
--Protocol design and standardization
--Software defined and virtual networks
-Privacy
-Software research
--Software testing
-Usability and human factors
--Accessibility
-Video analytics
-Virtual / augmented reality
-Visualization research
-Voting systems
Infrastructure
Manufacturing
-Additive manufacturing
-Factory communications
-Factory operations planning and control
-Interoperability in manufacturing
-Machining
-Manufacturing economics
-Manufacturing quality assurance
-Manufacturing systems design and analysis
-Monitoring, diagnostics and prognostics
-Process improvement
-Process measurement and control
-Product data
-Robotics in manufacturing
--Agility and adaptability
--Collaborative robots
--Dexterous grasping
--Manipulation
--Mobility and industrial autonomous vehicles
--Navigation / actuation / control
--Sensing and perception
-Supply chain
-Sustainable manufacturing
-Systems engineering
-Systems integration
-Technology commercialization
Materials
-Ceramics
-Composites
-Concrete / cement
-Materials characterization
--Composition and structure
--Mechanical properties
--Thermal properties
-Metals
-Modeling and computational material science
-Polymers
-Superconductors
Mathematics and statistics
-Experiment design
-Image and signal processing
-Modeling and simulation research
-Numerical methods and software
-Statistical analysis
-Uncertainty quantification
Metrology
-Amount of substance
-Dimensional metrology
-Electrical / electromagnetic metrology
-Flow metrology and rheology
-Force metrology
-Humidity metrology
-Ionizing radiation metrology
-Mass metrology
-Metric
-Optical / photometry / laser metrology
-Pressure and vacuum metrology
-Thermometry metrology
-Time and frequency metrology
-Weights and measures
Nanotechnology
-Nanobiotechnology
-Nanochemistry
-Nanoelectronics
-Nanofabrication / manufacturing
--Lithography
--Self-assembly
-Nanofluidics
-Nanomagnetics
-Nanomaterials
-Nanomechanics
-Nanometrology
-Nanophotonics
-Nanophysics
-Nanoplasmonics
Neutron research
Performance excellence
-Assessment tools and services
-Baldrige award
-Baldrige examiners
-Baldrige Framework and Criteria
-Best practices
-Leadership development
Physics
-Atomic / molecular / quantum
-Biological physics
-Condensed matter
-Electron physics
-Magnetics
-Nuclear physics
-Optical physics and communications
-Quantum information science
-Radiation
-Spectroscopy
-Thermodynamics
-Time and frequency
Public safety
-Chemical / Biological / Radiological / Nuclear / Explosives (CBRNE)
-First responder preparedness
-Law enforcement
-Public safety communications research
-Response robots
Resilience
-Community resilience
--Recovery
--Resilience metrics
-Disaster and failure studies
-Earthquake risk reduction
-Resilience economics
-Resilient materials
-Windstorm impact reduction
Standards
-Accreditation
-Calibration services
-Conformity assessment
-Documentary standards
-Frameworks
-Quality assurance
-Reference data
-Reference instruments
-Reference materials
-Standards education
Technology transfer
Transportation
-Aerospace
-Automotive