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NanoFab Tool: Sensofar Optical Profilometer

Sensofar optical profilometer
Credit: NIST

Photo of the Sensofar optical profilometer

The Sensofar optical profilometer is used to measure height variations including step heights and roughness across a surface using light.  It uses a nondestructive and non-contact surface metrology technique which can measure relatively large areas in a short amount of time.

Specifications/Capabilities

  • Vertical measurement resolutions down to 1 nm
  • Lateral resolution down to 50 nm
  • Microscope vertical axis travel of 40 mm
  • 1360 x 1024 pixel measurement array
  • 200 mm x 200 mm stage travel
  • Ability to stitch scans across large areas
  • Simple, easy to use joystick operation

Typical Applications

  • Profiling semiconductor device structures
  • Measuring large area arrays
  • Imaging MEMs structures
  • General topographic materials imaging
Created April 10, 2019, Updated November 25, 2019