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NanoFab Tool: Sensofar Optical Profilometer
Photo of the Sensofar optical profilometer
Credit:
NIST
The Sensofar optical profilometer is used to measure height variations including step heights and roughness across a surface using light. It uses a nondestructive and non-contact surface metrology technique which can measure relatively large areas in a short amount of time.
Specifications/Capabilities
- Vertical measurement resolutions down to 1 nm
- Lateral resolution down to 50 nm
- Microscope vertical axis travel of 40 mm
- 1360 x 1024 pixel measurement array
- 200 mm x 200 mm stage travel
- Ability to stitch scans across large areas
- Simple, easy to use joystick operation
Typical Applications
- Profiling semiconductor device structures
- Measuring large area arrays
- Imaging MEMs structures
- General topographic materials imaging
Created April 10, 2019, Updated February 24, 2023