Official websites use .gov
A .gov website belongs to an official government organization in the United States.
Secure .gov websites use HTTPS
A lock (
) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.
NanoFab Tool: Sandvik Anneal Furnaces
Photo of the Sandvik anneal furnaces
Credit:
NIST
The two Sandvik anneal furnaces, equipped with silicon carbide tubes, support anneal processing in the NanoFab. The anneal furnaces allow nitrogen, argon and forming gas anneals on substrates ranging from small chips to wafer diameters up to 200 mm.
Specifications/Capabilities
- Automatic recipe controller using Variable Parameter Table (VPT)
- Maximum Temperature: 1200 °C
- Standard anneal processes gases:
- Nitrogen
- Argon
- 10% forming gas
- Wafer diameters: 75 mm (3 in), 100 mm (4 in), 150 mm (6 in), and 200 mm (8 in)
- Small pieces supported: Yes
Typical Applications
- Dopant diffusion/activation
- Crystallization
- Densification of deposited films
- Sinter
- Anneal
Created April 10, 2019, Updated July 27, 2023