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NanoFab Equipment

Over 100 commercial tools are available within the NanoFab’s 5600 m2 (60,000 ft2) of advanced laboratory space, which includes 1800 m2 (19,000 ft2) of cleanroom. Most tools are located in the 750 m2 (8,000 ft2) class 100 cleanroom. Our key capabilities, tools, and processes are summarized below.


Soft Lithography

Focused Ion Beam Nanofabrication and Characterization

Advanced Imaging and Analysis

Imaging and Analysis Sample and Substrate Preparation


Thin Film Deposition and Processing

Dry Etch

Back-End-of-Line Tools

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