Skip to main content
U.S. flag

An official website of the United States government

Dot gov

The .gov means it’s official.
Federal government websites often end in .gov or .mil. Before sharing sensitive information, make sure you’re on a federal government site.


The site is secure.
The https:// ensures that you are connecting to the official website and that any information you provide is encrypted and transmitted securely.

NanoFab Tool: Tousimis Automegasamdri-916B Series C

Photograph of the Tousimis Automegasamdri-916B Series C critical point dryer.
Photograph of the Tousimis Automegasamdri-916B Series C critical point dryer.

The Tousimis Supercritical Automegasamdri-916B Series C critical point dryer uses liquid carbon dioxide (LCO2) to dry substrates in a controlled manner in order to release suspended and floating structures on microelectromechanical systems. The critical point dryer uses high temperature and pressure to transition from liquid to gas without crossing a phase boundary, thereby removing the surface tension between the sample and the surrounding liquid. It can accommodate substrates ranging from 200 mm diameter wafers down to small pieces.


  • Chamber illumination with viewing window to monitor processes.
  • Automatic processing for repeatable results.
  • High pressure LCO2 used as drying fluid.

Usage Information

Supported Sample Sizes

  • Maximum wafer diameter: 200 mm (8 in).
  • Small pieces supported: Yes.

Typical Applications

  • Microelectromechanical systems (MEMS).
  • Drying suspended and floating structures.
  • Nondestructive drying of membranes.
Created June 19, 2014, Updated December 4, 2019