NanoFab Tool: Tousimis Automegasamdri-916B Series C
The Tousimis Supercritical Automegasamdri-916B Series C critical point dryer uses liquid carbon dioxide (LCO2) to dry substrates in a controlled manner in order to release suspended and floating structures on microelectromechanical systems. The critical point dryer uses high temperature and pressure to transition from liquid to gas without crossing a phase boundary, thereby removing the surface tension between the sample and the surrounding liquid. It can accommodate substrates ranging from 200 mm diameter wafers down to small pieces.
Chamber illumination with viewing window to monitor processes.