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NanoFab Tool: Tousimis Automegasamdri-916B Series C

Photograph of the Tousimis Automegasamdri-916B Series C critical point dryer.
Photograph of the Tousimis Automegasamdri-916B Series C critical point dryer.

The Tousimis Supercritical Automegasamdri-916B Series C critical point dryer uses liquid carbon dioxide (LCO2) to dry substrates in a controlled manner in order to release suspended and floating structures on microelectromechanical systems. The critical point dryer uses high temperature and pressure to transition from liquid to gas without crossing a phase boundary, thereby removing the surface tension between the sample and the surrounding liquid. It can accommodate substrates ranging from 200 mm diameter wafers down to small pieces.

Specifications/Capabilities

  • Chamber illumination with viewing window to monitor processes.
  • Automatic processing for repeatable results.
  • High pressure LCO2 used as drying fluid.

Usage Information

Supported Sample Sizes

  • Maximum wafer diameter: 200 mm (8 in).
  • Small pieces supported: Yes.

Typical Applications

  • Microelectromechanical systems (MEMS).
  • Drying suspended and floating structures.
  • Nondestructive drying of membranes.
Created June 19, 2014, Updated December 4, 2019