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Marc J. Cangemi

Marc Cangemi is a Process Engineer in the CNST NanoFab Operations Group, where he is responsible for training and process support for NanoFab users in various nanofabrication areas, including metrology, optical and e-beam lithography. Marc has a B.S. in Microelectronic Engineering from the Rochester Institute of Technology. Prior to joining NIST he worked for Photronics, Inc., where he was responsible for the development and characterization of advanced and prototype photomasks.

Publications

Reference Metrology in a Research Fab: The NIST Clean Calibrations Thrust

Author(s)
Ronald G. Dixson, Ndubuisi G. Orji, Joseph Fu, Thomas B. Renegar, Xiaoyu A. Zheng, Theodore V. Vorburger, Albert M. Hilton, Marc J. Cangemi, Lei Chen, Michael A. Hernandez, Russell E. Hajdaj, Michael R. Bishop, Aaron Cordes
In 2004, the National Institute of Standards and Technology (NIST) commissioned the Advanced Measurement Laboratory (AML) – a state-of-the-art, five-wing

EUVL dosimetry at NIST

Author(s)
Charles S. Tarrio, Steven E. Grantham, Marc J. Cangemi, Robert E. Vest, Thomas B. Lucatorto, Noreen Harned
As part of its role in providing radiometric standards in support of industry, NIST has been active in advancing extreme ultraviolet dosimetry on various fronts
Created October 9, 2019