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NanoFab Tool: FEI Titan 80-300 Analytical Transmission Electron Microscope

Photograph of the FEI Titan 80-300 analytical electron microscope.

Photograph of the FEI Titan 80-300 analytical electron microscope.

Credit: A. Myers/NIST

The FEI Titan 80-300 scanning transmission electron microscope (STEM) is an advanced analytical field emission scanning transmission electron microscope capable of atomic-level imaging and analysis on a wide range of materials and nanostructures. The Titan is equipped with an electron energy loss spectrometer and an x-ray energy dispersive spectrometer for elemental and chemical analysis of materials at high spatial resolution. The microscope system includes a scanning module and a high angle annular dark field detector for scanning transmission electron microscopy (STEM) and for chemical analysis of very small volumes.


  • Acceleration voltage range: 80 kV to 300 kV with preset alignment for 80 kV, 200 kV, and 300 kV
  • Scanning transmission electron microscopy mode
  • Convergent beam and selected area electron diffraction modes
  • Conventional TEM modes
  • Point-to-point spatial resolution in TEM mode: 0.20 nm at 300 kV
  • STEM resolution: 0.136 nm at 300 kV
  • Super-twin objective lens pole piece
  • Gatan Orius digital camera (2k x 2k)
  • Gatan OneView IS CMOS camera (4k x 4k)
  • Fischione high angle annular dark field STEM detector for Z-contrast imaging
  • Gatan QuantumSETM energy filter for electron energy loss spectroscopy and energy-filtered TEM; filter energy spread: 0.8 eV
  • EDAX Si(Li) x-ray energy-dispersive spectrometer; energy resolution: 0.136 eV
  • Tomography acquisition, reconstruction, and analysis software
  • Analytical, heating, cooling, and tomography specimen holders

Usage Information

Sample Restrictions:

  • Thickness in region of interest: 100 nm or less
  • Maximum sample size: 3-mm diameter, 100 µm thick (including TEM specimen grid)
  • Materials to be analyzed must be approved by the NanoFab staff.
  • No magnetic materials.
  • Biomaterials must be biosafety level 0 (BSL-0). Toxic or potentially infections biomaterials are not allowed.

Typical Applications

  • Atomic-level imaging and analysis of nanomaterials and nanoparticles
  • Characterization of carbon nanotubes and graphene
  • Characterization of semiconductor devices and interfaces
  • Imaging and analysis of BSL-0 biomaterials
  • Tomographic imaging
Created May 19, 2014, Updated May 10, 2023