NanoFab Tool: FEI Titan 80-300 Analytical Transmission Electron Microscope
The FEI Titan 80-300 scanning transmission electron microscope (STEM) is an advanced analytical field emission scanning transmission electron microscope capable of atomic-level imaging and analysis on a wide range of materials and nanostructures. The Titan is equipped with an electron energy loss spectrometer and an x-ray energy dispersive spectrometer for elemental and chemical analysis of materials at high spatial resolution. The microscope system includes a scanning module and a high angle annular dark field detector for scanning transmission electron microscopy (STEM) and for chemical analysis of very small volumes.
Acceleration voltage range: 80 kV to 300 kV with preset alignment for 80 kV, 200 kV, and 300 kV
Scanning transmission electron microscopy mode
Convergent beam and selected area electron diffraction modes
Conventional TEM modes
Point-to-point spatial resolution in TEM mode: 0.20 nm at 300 kV
STEM resolution: 0.136 nm at 300 kV
Super-twin objective lens pole piece
Gatan Orius digital camera (2k x 2k)
Gatan OneView IS CMOS camera (4k x 4k)
Fischione high angle annular dark field STEM detector for Z-contrast imaging
Gatan QuantumSETM energy filter for electron energy loss spectroscopy and energy-filtered TEM; filter energy spread: 0.8 eV
EDAX Si(Li) x-ray energy-dispersive spectrometer; energy resolution: 0.136 eV
Tomography acquisition, reconstruction, and analysis software
Analytical, heating, cooling, and tomography specimen holders
Thickness in region of interest: 100 nm or less
Maximum sample size: 3-mm diameter, 100 µm thick (including TEM specimen grid)
Materials to be analyzed must be approved by the NanoFab staff.
No magnetic materials.
Biomaterials must be biosafety level 0 (BSL-0). Toxic or potentially infections biomaterials are not allowed.
Atomic-level imaging and analysis of nanomaterials and nanoparticles
Characterization of carbon nanotubes and graphene
Characterization of semiconductor devices and interfaces