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NanoFab Tool: Lattice Gear LatticeAx Cleaving Tool

Photograph of the Lattice Gear LatticeAx cleave tool.

The Lattice Gear LatticeAx cleaving tool is used for highly accurate, manual cleaving of substrates. The system is an indenting and cleaving tool that produces straight, long, mirror finish cleave lines on substrates ranging from 100 mm diameter wafers down to small pieces.


  • Cleave and indent positioning using an integrated microscope and precision stage.
  • Indent and cleave placement accuracy: 20 µm to 50 µm.
  • The tool can produce small, shallow surface indentations repeatedly.

Usage Information

Supported Sample Sizes

  • Maximum wafer diameter: 100 mm (4 in).
  • Small pieces supported: Yes.

Typical Applications

  • Site specific and general area sample downsizing.
Created June 19, 2014, Updated February 24, 2023