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NanoFab Tool: Bruker Dimension FastScan Atomic Force Microscope

Photograph of the Bruker Dimension FastScan Atomic Force Microscope.
Photograph of the Bruker Dimension FastScan Atomic Force Microscope.

The Bruker Dimension FastScan atomic force microscope (AFM) combines a high-speed scanning AFM, programmable stage control, and a user friendly interface to provide rapid nanoscale imaging capabilities on substrates ranging from 200 mm diameter wafers down to small pieces. The system supports scan areas of up to 35 µm x 35 µm and can automatically collect data from multiple locations on a substrate.

Specifications/Capabilities

  • Phase imaging, contact mode, and tapping mode.
  • Electrostatic force microscopy.
  • Magnetic force microscopy.
  • X-Y scan range: 35 µm x 35 µm.
  • Z range: 3 µm.
  • 125 Hz raster frequency in survey mode.
  • 150 mm by 180 mm motorized stage positioning.

Usage Information

Supported Sample Sizes

  • Maximum wafer diameter: 200 mm (8 in).
  • Small pieces supported: Yes.

Typical Applications

  • Imaging of nanoscale materials.
  • Characterization of topographic materials.
  • Non-destructive inspections of samples.
Created May 19, 2014, Updated October 19, 2018