The Tousimis Supercritical Autosamdri-815 Series B critical point dryer utilizes liquid carbon dioxide (LCO2) to dry substrates in a controlled manner in order to release suspended and floating structures on microelectromechanical systems. The critical point dryer uses high temperature and pressure to transition from liquid to gas without crossing a phase boundary, thereby removing the surface tension between the sample and the surrounding liquid. It can accommodate substrates ranging from 25 mm diameter wafers down to small pieces.