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NanoFab Tool: Microprocess Technology Avenger Spray Solvent Lift-off Tool
Photograph of the Microprocess Technology Avenger spray solvent lift-off tool.
The Microprocess Technology Avenger spray solvent lift-off tool uses a heated spray solvent to remove residual material and photoresist after deposition of a sacrificial layer. The tool provides "dry in, dry out" processes under recipe control to maximize lift-off efficiency while minimizing user exposure to chemicals.
Specifications/Capabilities
- Dry wafer in, dry wafer out process.
- Automatic recipe control.
- Quick change rotor system allows users to change wafer size.
Usage Information
Supported Sample Sizes
- Maximum wafer diameter: 150 mm (6 in).
- Wafer diameters: 75 mm (3 in), 100 mm (4 in), and 150 mm (6 in).
- Small pieces supported: only 25 mm squares.
Typical Applications
- Metal lift-off.
- Resist strip.
Created June 20, 2014, Updated February 24, 2023