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NanoFab Tool: Microprocess Technology Avenger Spray Solvent Lift-off Tool

Photograph of the Microprocess Technology Avenger spray solvent lift-off tool.
Photograph of the Microprocess Technology Avenger spray solvent lift-off tool.

The Microprocess Technology Avenger spray solvent lift-off tool uses a heated spray solvent to remove residual material and photoresist after deposition of a sacrificial layer. The tool provides "dry in, dry out" processes under recipe control to maximize lift-off efficiency while minimizing user exposure to chemicals.

Specifications/Capabilities

  • Dry wafer in, dry wafer out process.
  • Automatic recipe control.
  • Quick change rotor system allows users to change wafer size.

Usage Information

Supported Sample Sizes

  • Maximum wafer diameter: 150 mm (6 in).
  • Wafer diameters: 75 mm (3 in), 100 mm (4 in), and 150 mm (6 in).
  • Small pieces supported: only 25 mm squares.

Typical Applications

  • Metal lift-off.
  • Resist strip.
Created June 20, 2014, Updated November 9, 2020