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NanoFab Tool: Olympus SZH10 Stereo Microscope
The Olympus SZH10 is a long working distance stereo microscope that supports both reflected light and transmitted light modes for inspecting substrates and samples. The microscope provides continuous zoom magnifications ranging from 7 times to 640 times. An integrated five megapixel camera can capture high resolution digital images of substrates ranging from 150 mm diameter wafers down to small pieces.
Specifications/Capabilities
- Magnification range: 7 times to 640 times.
- Large working distance: > 50 mm.
- An integrated five megapixel camera for capturing images.
- Nikon NIS Elements software for image processing.
Usage Information
Supported Sample Sizes
- Maximum wafer diameter: 150 mm (6 in).
- Small pieces supported: Yes.
- Maximum thickness: 10 mm.
Typical Applications
- General structure and device inspection.
- Post wire-bonding inspections.
- Post dicing-saw inspections.
- Microscopic image capture.