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NanoFab Tool: Olympus SZH10 Stereo Microscope

Photograph of the Olympus SZH10 stereo microscope.

The Olympus SZH10 is a long working distance stereo microscope that supports both reflected light and transmitted light modes for inspecting substrates and samples. The microscope provides continuous zoom magnifications ranging from 7 times to 640 times. An integrated five megapixel camera can capture high resolution digital images of substrates ranging from 150 mm diameter wafers down to small pieces.

Specifications/Capabilities

  • Magnification range: 7 times to 640 times.
  • Large working distance: > 50 mm.
  • An integrated five megapixel camera for capturing images.
  • Nikon NIS Elements software for image processing.

Usage Information

Supported Sample Sizes

  • Maximum wafer diameter: 150 mm (6 in).
  • Small pieces supported: Yes.
  • Maximum thickness: 10 mm.

Typical Applications

  • General structure and device inspection.
  • Post wire-bonding inspections.
  • Post dicing-saw inspections.
  • Microscopic image capture.
Created May 21, 2014, Updated October 19, 2018