Tools & Instruments

NanoFab Tool: Suss MicroTec ACS200 Automated Resist Coater

The Suss MicroTec ACS200 is an automated photoresist coating and baking station with cassette-to-cassette substrate operation. It supports both spin coating and spray coating of photoresist on a variety of substrates. The tool provides complete resist coating capabilities, including hotplate baking up to 250 °C and automated edge-bead removal with backside rinse.

Specifications/Capabilities

  • Gyrset spin coat & Alta spray coat modules.
  • 250 °C programmable hotplate.
  • Automated edge-bead removal and back side rinse.

Usage Information

Supported Sample Sizes

  • Maximum wafer diameter: 200 mm (8 in).
  • Small pieces supported: Yes.
  • Maximum substrate thickness: 5 mm.
  • Wafer diameters supported:
    • 50 mm (2 in).
    • 75 mm (3 in).
    • 100 mm (4 in).
    • 150 mm (6 in).
    • 200 mm (8 in).
  • Photomask sizes supported:
    • 125 mm x 125 mm.
    • 150 mm x 150 mm.

Typical Applications

  • Photoresist coating for optical pattern exposure.
  • Photoresist coating for mask production.
Energy, Nanotechnology and Nanofabrication / manufacturing

Organizations

Details

NEMO Name:
Suss ACS200
Location:
Building 215 Rm. A105 (Cleanroom)
Campus:
Gaithersburg

Hours of Operation

Cleanroom hours

Tool Reservation Rules

  • Minimum Reservation Time: 30 minutes.
  • Maximum Reservation Time: 4 hours.
  • Adjacent Reservations Permitted: No.
  • Cancelation Policy: Reservations must be canceled at least 12 hours before the scheduled start time.

Hourly Rate

Standard Cost:
$149
Reduced Cost:
$80

Training Rates

Individual Cost:
$235
Group Cost:
$118

Training Time

Depends on user experience and process requirements; typically 2 hours.

Contact

Created May 07, 2014, Updated April 28, 2017