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NanoFab Tool: Specialty Coating Systems PDS 2010 Parylene Deposition System

parylene_dep

The Specialty Coating Systems PDS 2010 parylene deposition system provides users with reliable and repeatable conformal parylene coatings ranging from 75 micrometers down to a few nanometers thick. The system can accommodate substrates ranging from 200 mm diameter wafers down to small pieces.

Specifications/Capabilities

  • Precursors supported:
    • Parylene N.
    • Parylene C.
  • Thickness range: 75 µm to 10 nm.

Usage Information

Supported Sample Sizes

  • Maximum wafer diameter: 200 mm (8 in).
  • Small pieces supported: Yes.
  • Maximum thickness: 1 mm.

Typical Applications

  • Electronic and automotive applications.
  • Biocompatible coatings for medical applications.
  • Moisture and chemical barriers.
  • Thin film dielectrics.
Created June 6, 2014, Updated December 4, 2019