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NanoFab Tool: Nikon SMZ1500 Stereo Microscope

Photograph of the Nikon SMZ1500 stereo microscope.

The Nikon SMZ1500 is a long working distance stereo microscope that supports both reflected light and transmitted light modes for inspecting substrates and samples. The microscope provides continuous zoom magnifications ranging from 5 times to 480 times. An integrated five megapixel camera can capture high magnification, high resolution digital images of substrates ranging from 150 mm diameter wafers down to small pieces.

Specifications/Capabilities

  • Magnification range: 5 times to 480 times.
  • Large working distance: > 50 mm.
  • An integrated five megapixel camera for capturing images.
  • Nikon NIS Elements software for image processing.

Usage Information

Supported Sample Sizes

  • Maximum wafer diameter: 150 mm (6 in).
  • Small pieces supported: Yes.
  • Maximum thickness: 10 mm.

Typical Applications

  • General structure and device inspection.
  • Microscopic image capture.
Created May 21, 2014, Updated November 25, 2019