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NanoFab Tool: Fischione Model 1040 NanoMill Ion Mill

Photograph of the Fischione Model 1040 NanoMill.

The Fischione Model 1040 NanoMill is a low-energy, low-angle argon ion milling instrument used for preparing ultra-thin, high-quality transmission electron microscopy (TEM) specimens. The system is used for removing the amorphous damage layer on TEM specimens prepared by focused ion beam (FIB) milling, and for the final thinning of conventionally prepared and FIB prepared TEM specimens. The NanoMill operates at ion energies as low as 50 eV and can produce a beam diameter as small as 1 µm. TEM specimens can be prepared without amorphization, implantation, or redeposition. A secondary electron detector can image the ion-induced secondary electrons that are generated from the targeted area of the specimen.

Specifications/Capabilities

  • Ultra-low energy ion source, variable from 50 eV to 2 keV.
  • Concentrated argon ion beam, with a diameter down to 1 µm at 2 keV.
  • Milling angle range: -10° to +30°.
  • Liquid nitrogen-cooled specimen stage.
  • Ion-induced secondary electron imaging of the specimen.
  • Oil-free vacuum system with a base pressure of 3 x 10-5 Pa and an operating pressure of 1 x 10-2 Pa.

Typical Applications

  • Removal of amorphous and implanted layers on TEM specimens prepared by FIB milling.
  • Final thinning of conventionally prepared TEM specimens.
Created June 19, 2014, Updated November 25, 2019