NanoFab Tool: Keithley 4200 SCS Parametric Test Station
The Keithley 4200 SCS parametric test system provides in-line electrical characterization capabilities, including the ability to measure capacitance at multiple frequencies. The tool supports resistance measurements and transistor threshold measurements by supplying and measuring both DC and ultra-fast pulsed currents and voltages. A dark box enables light sensitive measurements. The enclosed chuck can accommodate substrates ranging from 150 mm diameter wafers down to small pieces and can controllably heat samples up to 300 °C.
Measure capacitance at multiple frequencies.
Source and measure both DC and ultra-fast pulsed currents and voltages.