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NanoFab Tool: Keithley 4200 SCS Parametric Test Station

Photograph of the Keithley 4200 SCS parametric test system.

The Keithley 4200 SCS parametric test system provides in-line electrical characterization capabilities, including the ability to measure capacitance at multiple frequencies. The tool supports resistance measurements and transistor threshold measurements by supplying and measuring both DC and ultra-fast pulsed currents and voltages. A dark box enables light sensitive measurements. The enclosed chuck can accommodate substrates ranging from 150 mm diameter wafers down to small pieces and can controllably heat samples up to 300 °C.

Specifications/Capabilities

  • Measure capacitance at multiple frequencies.
  • Source and measure both DC and ultra-fast pulsed currents and voltages.
  • Dark box for light sensitive measurements.
  • Heated chuck allows measurements up to 300 °C.

Usage Information

Supported Sample Sizes

  • Maximum wafer diameter: 150 mm (6 in).
  • Small pieces supported: Yes.
  • Maximum thickness: 5 mm.

Typical Applications

  • Mobile ion concentration measurement.
  • Pulsed current-voltage (IV) sweep.
  • Pattern short and open testing.
  • Semiconductor device threshold measurement.
Created May 21, 2014, Updated July 10, 2019