Skip to main content
U.S. flag

An official website of the United States government

Dot gov

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Https

Secure .gov websites use HTTPS
A lock ( ) or https:// means you've safely connected to the .gov website. Share sensitive information only on official, secure websites.

NanoFab Tool: Keithley 4200 SCS Parametric Test Station

Photograph of the Keithley 4200 SCS parametric test system.

The Keithley 4200 SCS parametric test system provides in-line electrical characterization capabilities, including the ability to measure capacitance at multiple frequencies. The tool supports resistance measurements and transistor threshold measurements by supplying and measuring both DC and ultra-fast pulsed currents and voltages. A dark box enables light sensitive measurements. The enclosed chuck can accommodate substrates ranging from 150 mm diameter wafers down to small pieces and can controllably heat samples up to 300 °C.

Specifications/Capabilities

  • Measure capacitance at multiple frequencies.
  • Source and measure both DC and ultra-fast pulsed currents and voltages.
  • Dark box for light sensitive measurements.
  • Heated chuck allows measurements up to 300 °C.

Usage Information

Supported Sample Sizes

  • Maximum wafer diameter: 150 mm (6 in).
  • Small pieces supported: Yes.
  • Maximum thickness: 5 mm.

Typical Applications

  • Mobile ion concentration measurement.
  • Pulsed current-voltage (IV) sweep.
  • Pattern short and open testing.
  • Semiconductor device threshold measurement.
Created May 21, 2014, Updated November 9, 2020