April 1, 1999
Author(s)
Mark A. Sobolewski, James K. Olthoff, Yicheng Wang
Ion energy distributions were measured at a grounded surface in an inductively-coupled, high-density plasma reactor for pure argon, argon-helium, and argon-xenon discharges at 1.33 Pa (10 mTorr), as a function of radio-frequency (rf) bias amplitude, rf