Roberts, J.
, Olthoff, J.
, Sobolewski, M.
, Van Brunt, R.
, Whetstone, J.
and Djurovic, S.
(1992),
Diagnostic Measurements in RF Plasmas for Materials Processing, Proc. 8th American Physical Soc. Topical Conf. on Atomic Processes in Plasmas, Portland, ME, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=28964
(Accessed December 10, 2024)
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Diagnostic Measurements in RF Plasmas for Materials Processing
Published
Author(s)
, , , , , S. Djurovic
Proceedings Title
Proc. 8th American Physical Soc. Topical Conf. on Atomic Processes in Plasmas
Conference Dates
August 25-29, 1991
Conference Location
Portland, ME, US
Pub Type
Conferences
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Citation
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If you have any questions about this publication or are having problems accessing it, please contact reflib@nist.gov.
Created June 30, 1992, Updated October 12, 2021