Skip to main content
U.S. flag

An official website of the United States government

Official websites use .gov
A .gov website belongs to an official government organization in the United States.

Secure .gov websites use HTTPS
A lock ( ) or https:// means you’ve safely connected to the .gov website. Share sensitive information only on official, secure websites.

Diagnostic Measurements in RF Plasmas for Materials Processing

Published

Author(s)

J R. Roberts, James K. Olthoff, Mark A. Sobolewski, Richard J. Van Brunt, James Whetstone, S. Djurovic
Proceedings Title
Proc. 8th American Physical Soc. Topical Conf. on Atomic Processes in Plasmas
Conference Dates
August 25-29, 1991
Conference Location
Portland, ME, US

Citation

Roberts, J. , Olthoff, J. , Sobolewski, M. , Van Brunt, R. , Whetstone, J. and Djurovic, S. (1992), Diagnostic Measurements in RF Plasmas for Materials Processing, Proc. 8th American Physical Soc. Topical Conf. on Atomic Processes in Plasmas, Portland, ME, US, [online], https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=28964 (Accessed April 16, 2024)
Created June 30, 1992, Updated October 12, 2021