TY  - CONF
AU  - J Roberts
AU  - James Olthoff
AU  - Mark Sobolewski
AU  - Richard Van Brunt
AU  - James Whetstone
AU  - S. Djurovic
C2  - Proc. 8th American Physical Soc. Topical Conf. on Atomic Processes in Plasmas, Portland, ME, US
DA  - 1992-07-01 00:07:00
LA  - en
PB  - Proc. 8th American Physical Soc. Topical Conf. on Atomic Processes in Plasmas, Portland, ME, US
PY  - 1992
TI  - Diagnostic Measurements in RF Plasmas for Materials Processing
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=28964
ER  -