TY  - CONF
AU  - Roberts, J
AU  - Olthoff, James
AU  - Sobolewski, Mark
AU  - Brunt, Richard Van
AU  - Whetstone, James
AU  - Djurovic, S.
C2  - Proc. 8th American Physical Soc. Topical Conf. on Atomic Processes in Plasmas, Portland, ME, US
DA  - 1992-07-01 00:07:00
LA  - en
PB  - Proc. 8th American Physical Soc. Topical Conf. on Atomic Processes in Plasmas, Portland, ME, US
PY  - 1992
TI  - Diagnostic Measurements in RF Plasmas for Materials Processing
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=28964
ER  -