@conference{760126,
  author = {J Roberts and James Olthoff and Mark Sobolewski and Richard Van Brunt and James Whetstone and S. Djurovic},
  title = {Diagnostic Measurements in RF Plasmas for Materials Processing},
  year = {1992},
  month = {1992-07-01 00:07:00},
  publisher = {Proc. 8th American Physical Soc. Topical Conf. on Atomic Processes in Plasmas, Portland, ME, US},
  url = {https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=28964},
  language = {en},
}